[IEEE 2016 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2016.3.13-2016.3.14)] 2016 China Semiconductor Technology International Conference (CSTIC) - Design technology co-optimization for N14 Metal1 layer
Duan, Yingli, Su, Xiaojing, Chen, Ying, Su, Yajuan, Wei, Yayi, Shao, Feng, Zhang, Recco, Lei, JunjiangYear:
2016
Language:
english
DOI:
10.1109/cstic.2016.7463980
File:
PDF, 294 KB
english, 2016