Fabrication of regular silicon microstructures by photo-electrochemical etching of silicon
G. Barillaro, P. Bruschi, A. Diligenti, A. NanniniVolume:
2
Year:
2005
Language:
english
Pages:
5
DOI:
10.1002/pssc.200461110
File:
PDF, 534 KB
english, 2005