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Spectroscopic second harmonic generation as a diagnostic tool in silicon materials processing
J. J. H. Gielis, A. A. E. Stevens, P. M. Gevers, H. C. W. Beijerinck, M. C. M. van de Sanden, W. M. M. KesselsVolume:
2
Year:
2005
Language:
english
Pages:
5
DOI:
10.1002/pssc.200562219
File:
PDF, 179 KB
english, 2005