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[IEEE 2003 IEEE International Symposium on Semiconductor Manufacturing. - San Jose, CA, USA (30 Sept.-2 Oct. 2003)] 2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690) - Use of a by-wafer yield model for improved signal to noise on split experiments targeting systematic yield loss mechanisms
Patterson, O.D., Wroge, D.M.Year:
2003
Language:
english
DOI:
10.1109/issm.2003.1243334
File:
PDF, 258 KB
english, 2003