[IEEE 2014 Symposium on Piezoelectricity,Acoustic Waves, and Device Applications (SPAWDA) - Beijing, China (2014.10.30-2014.11.2)] Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications - Microaccelerometer based on surface acoustic waves
Lukyanov, D., Shevchenko, S., Kukaev, A., Filippova, E., Safronov, D.Year:
2014
Language:
english
DOI:
10.1109/spawda.2014.6998515
File:
PDF, 820 KB
english, 2014