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[IEEE 2015 International Conference on Science and Technology (TICST) - Pathum Thani, Thailand (2015.11.4-2015.11.6)] 2015 International Conference on Science and Technology (TICST) - Growth and characterization of CrAlN thin film deposited by DC reactive co-sputtering
Khambun, Amonrat, Chaiyakun, Surasing, Buranawong, Adisorn, Witit-anun, NirunYear:
2015
Language:
english
DOI:
10.1109/ticst.2015.7369412
File:
PDF, 871 KB
english, 2015