[IEEE IC's - Kitakyushu, Japan (2004.05.27-2004.05.27)] Proceedings of the 16th International Symposium on Power Semiconductor Devices & IC's - A novel fully self-aligned process for high cell density trench gate power MOSFETs
Bing-Yue Tsui,, Tian-Choy Gan,, Ming-Da Wu,, Hui-Hua Chou,, Zhi-Liang Wu,, Ching-Tzong Sune,Year:
2004
Language:
english
DOI:
10.1109/wct.2004.239932
File:
PDF, 234 KB
english, 2004