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SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography - New method for achieving accurate thickness control for uniform and graded multilayer coatings on large flat substrates
Gutman, George, Keem, John E., Parker, Kevin, Wood, James L., Watts, Richard N., Tarrio, Charles, Hoover, Richard B., Walker II, Arthur B. C.Volume:
1742
Year:
1993
Language:
english
DOI:
10.1117/12.140602
File:
PDF, 413 KB
english, 1993