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SPIE Proceedings [SPIE The International Conference on Micro- and Nano-Electronics 2014 - Zvenigorod, Russian Federation (Monday 6 October 2014)] International Conference on Micro- and Nano-Electronics 2014 - SOI layout decomposition for double patterning lithography on high-performance computer platforms
Orlikovsky, Alexander A., Verstov, Vladimir, Zinchenko, Lyudmila, Makarchuk, VladimirVolume:
9440
Year:
2014
Language:
english
DOI:
10.1117/12.2180809
File:
PDF, 530 KB
english, 2014