SPIE Proceedings [SPIE Micromachining and Microfabrication...

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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Micromachined Devices and Components - Multiaxis microcoil sensors in standard CMOS

Eyre, Beverley, Pister, Kristofer S. J., Gekelman, Walter, Roop, Ray M., Chau, Kevin H.
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Volume:
2642
Year:
1995
Language:
english
DOI:
10.1117/12.221168
File:
PDF, 506 KB
english, 1995
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