SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II - Advanced optical characterization techniques for borophosphosilicate films
Carpio, Ronald A., Taylor, Jon, Lowell, John K., Chen, Ray T., Mathur, Jagdish P.Volume:
2638
Year:
1995
Language:
english
DOI:
10.1117/12.221205
File:
PDF, 303 KB
english, 1995