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SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Microelectronic Device and Multilevel Interconnection Technology II - Scaling considerations of interpoly oxide-nitride-oxide dielectric for high-density DRAM applications
Ma, Zhijian, Choi, Jeong Y., Lien, Chuen-Der, Chen, Ih-Chin, Sasaki, Nobuo, Patel, Divyesh N., Dixit, Girish A.Volume:
2875
Year:
1996
Language:
english
DOI:
10.1117/12.250866
File:
PDF, 320 KB
english, 1996