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SPIE Proceedings [SPIE 16th Annual BACUS Symposium on Photomask Technology and Management - Redwood City, CA (Wednesday 18 September 1996)] 16th Annual BACUS Symposium on Photomask Technology and Management - Comparison of reticle placement performance using two-point and multipoint fitting algorithms
Hamaker, Henry Chris, Martyniuk, Jerry, Sills, Robert M., Varner, Jeffrey K., Standiford, Keith P., Shelden, Gilbert V., Reynolds, James A.Volume:
2884
Year:
1996
Language:
english
DOI:
10.1117/12.262820
File:
PDF, 382 KB
english, 1996