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SPIE Proceedings [SPIE Electronic Imaging '97 - San Jose, CA (Saturday 8 February 1997)] Active Matrix Liquid Crystal Displays Technology and Applications - Polysilicon TFTs for AMLCD applications with gate oxides grown in a low-temperature N2O plasma
Howell, Robert S., Kaluri, Sita R., Hatalis, Miltiadis K., Hess, Dennis W., Voutsas, Tolis, King, Tsu-JaeVolume:
3014
Year:
1997
Language:
english
DOI:
10.1117/12.270293
File:
PDF, 283 KB
english, 1997