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SPIE Proceedings [SPIE Photonics West '97 - San Jose, CA (Saturday 8 February 1997)] Silicon-Based Monolithic and Hybrid Optoelectronic Devices - Ultralow-cost surface-micromachined tunneling sensor
Kirby, Deborah J., Kubena, Randall L., Stratton, Fred P., Robinson, W. P., Joyce, Robert L., Hackett, Leroy H., Houghton, Derek C., Jalali, BahramVolume:
3007
Year:
1997
Language:
english
DOI:
10.1117/12.273841
File:
PDF, 382 KB
english, 1997