SPIE Proceedings [SPIE Optical Science, Engineering and Instrumentation '97 - San Diego, CA (Sunday 27 July 1997)] Applications of X Rays Generated from Lasers and Other Bright Sources - X-ray micromachining of deep 3D terahertz waveguide components using a laser plasma source at 1-nm wavelength
Turcu, I. C. Edmond, Mann, Chris M., Moon, Sung W., Maddison, B. J., Allott, Ric M., Lisi, Nicola, Huq, Syed E., Kim, Nam Seong, Kyrala, George A., Gauthier, Jean-Claude J.Volume:
3157
Year:
1997
Language:
english
DOI:
10.1117/12.284000
File:
PDF, 575 KB
english, 1997