SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachining and Microfabrication Process Technology III - Assembly of hybrid microsystems in a large-chamber scanning electron microscope by use of mechanical grippers
Weck, Manfred, Huemmler, Joachim, Petersen, Bernd, Chang, Shih-Chia, Pang, Stella W.Volume:
3223
Year:
1997
DOI:
10.1117/12.284484
File:
PDF, 1.51 MB
1997