SPIE Proceedings [SPIE Third International Conference on Thin Film Physics and Applications - Shanghai, China (Tuesday 15 April 1997)] Third International Conference on Thin Film Physics and Applications - Temperature dependence of porous silica antireflective (AR) coating
Tang, Yongxing, Le, Yueqin, Zhang, Weiqing, Jiang, Minhua, Sun, Jinren, Liu, Xiaolin, Zhou, Shixun, Wang, Yongling, Chen, Yi-Xin, Mao, ShuzhengVolume:
3175
Year:
1998
DOI:
10.1117/12.300654
File:
PDF, 410 KB
1998