SPIE Proceedings [SPIE Optoelectronics and High-Power Lasers & Applications - San Jose, CA (Saturday 24 January 1998)] Miniaturized Systems with Micro-Optics and Micromechanics III - MEMS-based diffractive optical-beam-steering technology
Winick, David A., Duewer, Bruce E., Chaudhury, Som, Wilson, John M., Tucker, John, Eksi, Umut, Franzon, Paul D., Motamedi, M. Edward, Goering, RolfVolume:
3276
Year:
1998
Language:
english
DOI:
10.1117/12.302411
File:
PDF, 1.34 MB
english, 1998