SPIE Proceedings [SPIE SPIE's International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, CA (Sunday 19 July 1998)] Recent Developments in Optical Gauge Block Metrology - Interferometer for long gauge blocks up to 1000 mm and its measurement uncertainty
Narumi, Tatsuya, Saruki, Yoshio, Nakamura, Taizo, Shutoh, Shunji, Sawabe, Masaji, Decker, Jennifer E., Brown, NicholasVolume:
3477
Year:
1998
Language:
english
DOI:
10.1117/12.323093
File:
PDF, 249 KB
english, 1998