SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Emerging Lithographic Technologies III - High-power extreme ultraviolet source based on a Z-pinch
McGeoch, Malcolm W., Vladimirsky, YuliVolume:
3676
Year:
1999
Language:
english
DOI:
10.1117/12.351154
File:
PDF, 1.04 MB
english, 1999