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SPIE Proceedings [SPIE SPIE's International Symposium on Optical Science, Engineering, and Instrumentation - Denver, CO (Sunday 18 July 1999)] Optical Manufacturing and Testing III - McCarter Superfinish for silicon
Anthony, Frank M., McCarter, Douglas R., Bertelsen, Jeff L., Tangedahl, Matt, Stahl, H. PhilipVolume:
3782
Year:
1999
Language:
english
DOI:
10.1117/12.369223
File:
PDF, 2.49 MB
english, 1999