SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachined Devices and Components VI - Microsystems for diverse applications using recently developed microfabrication techniques
Dellmann, Laurent, Akiyama, Terunobu, Briand, Danick, Gautsch, Sebastien, Guenat, Olivier T., Guldimann, Benedikt, Luginbuhl, Philippe, Marxer, Cornel, Staufer, Urs, van der Schoot, Bart, de Rooij, NiVolume:
4176
Year:
2000
Language:
english
DOI:
10.1117/12.395631
File:
PDF, 2.94 MB
english, 2000