SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] MEMS Design, Fabrication, Characterization, and Packaging - Fabrication of microshutter arrays for space application
Li, Mary J., Aslam, I. S., Ewin, Audrey J., Fettig, Rainer K., Franz, David E., Kotecki, Carl A., Kutyrev, Alexander S., Moseley, Jr., Samuel H., Monroy, Carlos J., Mott, David B., Zheng, Yun, BehringVolume:
4407
Year:
2001
Language:
english
DOI:
10.1117/12.425314
File:
PDF, 725 KB
english, 2001