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SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Emerging Lithographic Technologies V - Thick silicon membranes as mask blank for SU-8 x-ray deep lithography
Maia, Izaque A., Ferreira, Luis O. S., Piazzetta, Maria Helena O., Natal, Graziele C., Dobisz, Elizabeth A.Volume:
4343
Year:
2001
Language:
english
DOI:
10.1117/12.436681
File:
PDF, 668 KB
english, 2001