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SPIE Proceedings [SPIE International Conference on Sensing units and Sensor Technology - Wuhan, China (Wednesday 10 October 2001)] International Conference on Sensor Technology (ISTC 2001) - FEA modeling of a thermally excited silicon-beam resonant pressure sensor
Chen, Deyong, Cui, Dafu, Wang, Li, Yu, Zhongyao, Cui, Zheng, Xia, Shanhong, Zhou, Yikai, Xu, ShunqingVolume:
4414
Year:
2001
Language:
english
DOI:
10.1117/12.440192
File:
PDF, 169 KB
english, 2001