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SPIE Proceedings [SPIE Second International Symposium on Laser Precision Micromachining - Singapore, Singapore (Wednesday 16 May 2001)] Second International Symposium on Laser Precision Microfabrication - Generation of periodic microstructures with femtosecond laser pulses
Toenshoff, Hans K., Ostendorf, Andreas, Korte, Frank, Serbin, J., Bauer, Thorsten, Miyamoto, Isamu, Lu, Yong Feng, Sugioka, Koji, Dubowski, Jan J.Volume:
4426
Year:
2002
Language:
english
DOI:
10.1117/12.456818
File:
PDF, 456 KB
english, 2002