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SPIE Proceedings [SPIE High-Power Lasers and Applications - San Jose, CA (Friday 18 January 2002)] Photon Processing in Microelectronics and Photonics - High-resolution F2-laser machining of micro-optic components
Li, Jianzhao, Herman, Peter R., Wei, Xiaoli M., Chen, Kevin P., Ihlemann, Juergen, Marowsky, Gerd, Oesterlin, Peter, Burghardt, Berthold, Sugioka, Koji, Gower, Malcolm C., Haglund, Jr., Richard F., PiVolume:
4637
Year:
2002
Language:
english
DOI:
10.1117/12.470627
File:
PDF, 422 KB
english, 2002