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SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Optical Microlithography XV - OPC applications into embedded-OPC designs
Bailey, George E., Brist, Travis E., Yen, AnthonyVolume:
4691
Year:
2002
Language:
english
DOI:
10.1117/12.474502
File:
PDF, 294 KB
english, 2002