SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining Technology for Micro-Optics and Nano-Optics - Time-tailored laser pulses: a new approach for laser micromachining and microfabrication processing
Stock, Michelle L., Endert, Heinrich, Patel, Rajesh S., Johnson, Eric G.Volume:
4984
Year:
2003
Language:
english
DOI:
10.1117/12.477843
File:
PDF, 641 KB
english, 2003