SPIE Proceedings [SPIE Photonics Asia 2002 - Shanghai,...

  • Main
  • SPIE Proceedings [SPIE Photonics Asia...

SPIE Proceedings [SPIE Photonics Asia 2002 - Shanghai, China (Monday 14 October 2002)] MEMS/MOEMS Technologies and Applications - Microstructures of PMMA sheet fabricated by RIE

Huang, Longwang, Yang, Chunsheng, Ding, Guifu, Jin, Guofan, McKillop, John S., Hane, Kazuhiro
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
4928
Year:
2002
Language:
english
DOI:
10.1117/12.483173
File:
PDF, 375 KB
english, 2002
Conversion to is in progress
Conversion to is failed