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SPIE Proceedings [SPIE Photonics Asia 2002 - Shanghai, China (Monday 14 October 2002)] MEMS/MOEMS Technologies and Applications - Microstructures of PMMA sheet fabricated by RIE
Huang, Longwang, Yang, Chunsheng, Ding, Guifu, Jin, Guofan, McKillop, John S., Hane, KazuhiroVolume:
4928
Year:
2002
Language:
english
DOI:
10.1117/12.483173
File:
PDF, 375 KB
english, 2002