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SPIE Proceedings [SPIE Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics - Kiev, Ukraine (Wednesday 22 May 2002)] Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics - Model of control of glow discharge electron gun current for microelectronics production applications
Denbnovetsky, S. V., Melnyk, V. I., Melnyk, I. V., Tugay, B. A., Sizov, Fiodor F., Gumenjuk-Sichevska, Johanna V., Kostyukevych, Sergey A.Volume:
5065
Year:
2003
Language:
english
DOI:
10.1117/12.502174
File:
PDF, 835 KB
english, 2003