SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications - Development of a figure correction method having spatial resolution close to 0.1 mm
Mori, Yuzo, Yamauchi, Kazuto, Yamamura, Kazuya, Mimura, Hidekazu, Sano, Yasuhisa, Saito, Akira, Endo, Katsuyoshi, Souvorov, Alexei, Yabashi, Makina, Tamasaku, Kenji, Ishikawa, Tetsuya, Khounsary, AliVolume:
5193
Year:
2004
Language:
english
DOI:
10.1117/12.520825
File:
PDF, 194 KB
english, 2004