SPIE Proceedings [SPIE Fourth International Symposium on laser Precision Microfabrication - Munich, Germany (Saturday 21 June 2003)] Fourth International Symposium on Laser Precision Microfabrication - Fabrication of 3D microreactor structures embedded in photosensitive glass by femtosecond laser
Masuda, Masashi, Sugioka, Koji, Cheng, Ya, Kawachi, Masako, Shihoyama, Kazuhiko, Toyoda, Koichi, Midorikawa, Katsumi, Miyamoto, Isamu, Ostendorf, Andreas, Sugioka, Koji, Helvajian, HenryVolume:
5063
Year:
2003
Language:
english
DOI:
10.1117/12.541066
File:
PDF, 503 KB
english, 2003