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SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Optical Microlithography XVII - Mask-induced polarization
Estroff, Andrew, Smith, Bruce W., Fan, Yongfa, Bourov, Anatoly, Cropanese, Frank C., Lafferty, Neal V., Zavyalova, Lena V., Smith, Bruce W.Volume:
5377
Year:
2004
Language:
english
DOI:
10.1117/12.546423
File:
PDF, 139 KB
english, 2004