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SPIE Proceedings [SPIE Sixth International Conference on Vicration Measurements by Laser Techniques: Advances and Applications - Ancona, Italy (Tuesday 22 June 2004)] Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications - Evaluation of thermal loading effects of laser Doppler vibrometer applied to micro-electro-mechanical systems (MEMS)
Cannella, Ferdinando, Marchetti, Barbara, Tomasini, Enrico P.Volume:
5503
Year:
2004
Language:
english
DOI:
10.1117/12.579567
File:
PDF, 1.28 MB
english, 2004