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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Micromachining and Microfabrication Process Technology X - Design and fabrication of giant micromirrors using electroplating-based technology
Ilias, Samir, Maher, Mary-Ann, Stewart, Harold D., Topart, Patrice A., Larouche, Carl, Leclair, Sebastien, Jerominek, HubertVolume:
5715
Year:
2005
Language:
english
DOI:
10.1117/12.591787
File:
PDF, 724 KB
english, 2005