SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] MOEMS Display, Imaging, and Miniaturized Microsystems IV - Investigation of optical information for a single micro grating device combined with MATA by SMart process
Tsai, Chien-Chung, Huang, Yi-Chao, Yang, Tsa-Hsien, Chen, Jen-Chieh, Ürey, Hakan, Dickensheets, David L., Gogoi, Bishnu P.Volume:
6114
Year:
2006
Language:
english
DOI:
10.1117/12.645040
File:
PDF, 1.99 MB
english, 2006