SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and...

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SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, California, United States (Saturday 20 January 2007)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI - Analytical model of a single stage compliant mechanism with flexible lever beam

Hassanpour, Pezhman A., Hartzell, Allyson L., Ramesham, Rajeshuni, Cleghorn, William L., Esmailzadeh, Ebrahim, Mills, James K.
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Volume:
6463
Year:
2007
Language:
english
DOI:
10.1117/12.701202
File:
PDF, 178 KB
english, 2007
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