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SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Metrology, Inspection, and Process Control for Microlithography XXI - An approach to modeling and on-line identification for piezoelectric stack actuator
Wang, Yueyu, Archie, Chas N., Zhao, Xuezeng, Chu, WeiVolume:
6518
Year:
2007
Language:
english
DOI:
10.1117/12.711851
File:
PDF, 438 KB
english, 2007