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SPIE Proceedings [SPIE Microtechnologies for the New Millennium - Maspalomas, Gran Canaria, Spain (Wednesday 2 May 2007)] Smart Sensors, Actuators, and MEMS III - Development of automated microrobot-based nanohandling stations for nanocharacterization
Fatikow, Sergej, Eichhorn, Volkmar, Krohs, Florian, Mircea, Iulian, Stolle, Christian, Hagemann, Saskia, Becker, Thomas, Cané, Carles, Barker, N. ScottVolume:
6589
Year:
2007
Language:
english
DOI:
10.1117/12.715630
File:
PDF, 1.49 MB
english, 2007