SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 19 January 2008)] Photon Processing in Microelectronics and Photonics VII - Precision microfabrication of AlN and Al 2 O 3 ceramics by femtosecond laser ablation
Kim, Sung Hoon, Holmes, Andrew S., Meunier, Michel, Balasubramani, T., Sohn, Ik-Bu, Arnold, Craig B., Niino, Hiroyuki, Noh, Yong-Chul, Lee, Jongmin, Geohegan, David B., Träger, Frank, Lee, Jee Bum, JeVolume:
6879
Year:
2008
Language:
english
DOI:
10.1117/12.762701
File:
PDF, 1.37 MB
english, 2008