SPIE Proceedings [SPIE Photomask and NGL Mask Technology XV...

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SPIE Proceedings [SPIE Photomask and NGL Mask Technology XV - Yokohama, Japan (Wednesday 16 April 2008)] Photomask and Next-Generation Lithography Mask Technology XV - Model-based mask verification on critical 45nm logic masks

Sundermann, F., Horiuchi, Toshiyuki, Foussadier, F., Takigawa, T., Wiley, J., Vacca, A., Depre, L., Chen, G., Bai, S., Wang, J.-S., Howell, R., Arnoux, V., Hayano, K., Narukawa, S., Kawashima, S., Moh
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Volume:
7028
Year:
2008
Language:
english
DOI:
10.1117/12.793037
File:
PDF, 1.48 MB
english, 2008
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