SPIE Proceedings [SPIE SPIE Lithography Asia - Taiwan - Taipei, Taiwan (Tuesday 4 November 2008)] Lithography Asia 2008 - Characterization of inhomogeneous samples by spectroscopic Mueller polarimetry
Foldyna, M., Chen, Alek C., Lin, Burn, De Martino, A., Ossikovski, R., Yen, Anthony, Garcia-Caurel, E., Cattelan, D., Licitra, C.Volume:
7140
Year:
2008
Language:
english
DOI:
10.1117/12.804690
File:
PDF, 484 KB
english, 2008