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SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII - Reliability study of micromechanical actuators for electrostatic RMS voltage measurements using bulk-silicon technology
Dittmer, Jan, Kullberg, Richard C., Ramesham, Rajeshuni, Judaschke, Rolf, Büttgenbach, StephanusVolume:
7206
Year:
2009
Language:
english
DOI:
10.1117/12.809464
File:
PDF, 238 KB
english, 2009