SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII - Reliability study of micromechanical actuators for electrostatic RMS voltage measurements using bulk-silicon technology

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