SPIE Proceedings [SPIE SPIE Europe Optics + Optoelectronics - Prague, Czech Republic (Monday 20 April 2009)] Optical Sensors 2009 - Measuring small thickness changes of a thin film by white-light spectral interferometry
Hlubina, P., Baldini, Francesco, Homola, Jiri, Lunácek, J., Ciprian, D., Lieberman, Robert A., Lunácková, M.Volume:
7356
Year:
2009
Language:
english
DOI:
10.1117/12.820005
File:
PDF, 250 KB
english, 2009