Homogeneity assessment of large-diameter III-V compound semiconductor substrates by near-infrared transmittance measurement
Yusuke Inoue, Takuya Kitamoto, Masayoshi Yamada, Tomohiro KawaseVolume:
4
Year:
2007
Language:
english
Pages:
4
DOI:
10.1002/pssc.200674258
File:
PDF, 356 KB
english, 2007