Homogeneity assessment of large-diameter III-V compound...

Homogeneity assessment of large-diameter III-V compound semiconductor substrates by near-infrared transmittance measurement

Yusuke Inoue, Takuya Kitamoto, Masayoshi Yamada, Tomohiro Kawase
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Volume:
4
Year:
2007
Language:
english
Pages:
4
DOI:
10.1002/pssc.200674258
File:
PDF, 356 KB
english, 2007
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