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SPIE Proceedings [SPIE OPTO - San Francisco, California (Saturday 23 January 2010)] Integrated Optics: Devices, Materials, and Technologies XIV - High performance optical waveguides based on boron and phosphorous doped silicon oxynitride
Sun, Fei, Broquin, Jean-Emmanuel, Greiner, Christoph M., Driessen, Alfred, Wörhoff, KerstinVolume:
7604
Year:
2010
Language:
english
DOI:
10.1117/12.845634
File:
PDF, 2.49 MB
english, 2010