SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Advances in Resist Materials and Processing Technology XXVII - Highly sensitive EUV-resist based on thiol-ene radical reaction

Shirai, Masamitsu, Allen, Robert D., Maki, Koichi, Okamura, Haruyuki, Kaneyama, Koji, Itani, Toshiro
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Volume:
7639
Year:
2010
Language:
english
DOI:
10.1117/12.846339
File:
PDF, 1.19 MB
english, 2010
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