SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

  • Main
  • SPIE Proceedings [SPIE SPIE Advanced...

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Advances in Resist Materials and Processing Technology XXVII - Dynamics of radical cation of poly(4-hydroxystyrene) generated in thin film upon exposure to electron beam

Natsuda, Kenichiro, Allen, Robert D., Kozawa, Takahiro, Okamoto, Kazumasa, Saeki, Akinori, Tagawa, Seiichi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
7639
Year:
2010
Language:
english
DOI:
10.1117/12.846699
File:
PDF, 226 KB
english, 2010
Conversion to is in progress
Conversion to is failed